1

Stress concentration structure with front beam for pressure sensor

Year:
1991
Language:
english
File:
PDF, 395 KB
english, 1991
3

Study on linearization of silicon capacitive pressure sensors

Year:
1997
Language:
english
File:
PDF, 592 KB
english, 1997
4

Analysis and design of a four-terminal silicon pressure sensor at the centre of a diaphragm

Year:
1987
Language:
english
File:
PDF, 473 KB
english, 1987
5

Squeeze film air damping in MEMS

Year:
2007
Language:
english
File:
PDF, 1.07 MB
english, 2007
6

Over-range capacity of a piezoresistive microaccelerometer

Year:
1997
Language:
english
File:
PDF, 218 KB
english, 1997
7

Analysis and Design Principles of MEMS Devices || Introduction to MEMS Devices

Year:
2005
Language:
english
File:
PDF, 2.58 MB
english, 2005
8

Analysis on twin-mass structure for a piezoresistive accelerometer

Year:
1992
Language:
english
File:
PDF, 628 KB
english, 1992
9

Future of microelectromechanical systems (MEMS)

Year:
1996
Language:
english
File:
PDF, 792 KB
english, 1996
12

Maskless etching of three-dimensional silicon structures in KOH

Year:
1996
Language:
english
File:
PDF, 673 KB
english, 1996
18

Analysis and Design Principles of MEMS Devices || Capacitive Sensing and Effects of Electrical Excitation

Year:
2005
Language:
english
File:
PDF, 1.64 MB
english, 2005
20

SOI Structure pressure transducer formed by oxidized porous silicon

Year:
1990
Language:
english
File:
PDF, 523 KB
english, 1990
22

Friction and wear properties in MEMS

Year:
2002
Language:
english
File:
PDF, 93 KB
english, 2002
23

Squeeze-film air damping of thick hole-plate

Year:
2003
Language:
english
File:
PDF, 160 KB
english, 2003
25

Analysis and Design Principles of MEMS Devices || Electrostatic Actuation

Year:
2005
Language:
english
File:
PDF, 2.22 MB
english, 2005
26

Analysis and Design Principles of MEMS Devices || Piezoresistive sensing

Year:
2005
Language:
english
File:
PDF, 2.44 MB
english, 2005
27

Preface

Year:
1991
Language:
english
File:
PDF, 51 KB
english, 1991
30

Preface

Year:
2012
Language:
english
File:
PDF, 244 KB
english, 2012
32

Analysis and Design Principles of MEMS Devices || Mechanics of Beam and Diaphragm Structures

Year:
2005
Language:
english
File:
PDF, 3.13 MB
english, 2005
33

Analysis and Design Principles of MEMS Devices || Air Damping

Year:
2005
Language:
english
File:
PDF, 2.72 MB
english, 2005
35

Preface

Year:
2013
Language:
english
File:
PDF, 247 KB
english, 2013